What Thickness of the Piezoelectric Layer with High Breakdown Voltage is Required for the Microactuator?
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-05-30
著者
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Lebedev Maxim
National Institute Of Advanced Industrial Science And Technology (aist)
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Lebedev Maxim
National Institute Of Advanced Industrial Science And Technology Aist
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Akedo Jun
National Institute of Advanced Industrial Science and Technology (AIST)
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Akedo Jun
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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Akedo Jun
National Institute Of Advanced Industrial Science And Technology Aist
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