Influence of Carrier Gas Conditions on Electrical and Optical Properties of Pb(Zr, Ti)O_3 Thin Films Prepared by Aerosol Deposition Method

概要

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Transparent Pb(Zr,Ti)O_3 (PZT) thin films with over 1μm thickness were deposited by the aerosol deposition method (ADM). The transparency of the PZT thin film deposited at room temperature strongly depended on the kinds of carrier gases and the particle flow velocity. The color of the film became black if He gas was used as a carrier gas, and became transparent using N_2, O_2 or air gases, which were difficult to electrically discharge during the impacting of particles. The transmittance values in the 0.5-0.8μm wavelength region of as-deposited 2-μm-thick PZT thin films on indium tin oxide (ITO) substrate were 70-80%. After annealing at 600℃, the remanent polarizations and the coercive fields of PZT thin films were 36μC/cm^2 and 89kV/cm, respectively. With increasing carrier gas velocity, the remanent polarization decreased and the coercive field increased.
社団法人応用物理学会の論文
2001-09-30