Gigahertz-rate optical modulation on Mach-Zehnder PLZT electro-optic modulators formed on silicon substrates by aerosol deposition
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概要
- 論文の詳細を見る
Mach-Zehnder (MZ) lanthanum-modified lead-zirconate-titanate (PLZT) electro-optic modulators were fabricated on a silicon substrate by aerosol deposition. The fabricated modulator has a reversed-ridge-waveguide structure (with a 1.8-µm-wide ridge) and electrodes for applying a voltage perpendicular to the PLZT core layer. The modulator also has an MZ interferometer structure in which the device length and the electrode length of phase shifter are 1.5mm and 500µm, respectively. Optical-characteristics measurements showed that the 2-GHz optical output signal was produced by the modulator. The optical performance proves the validity of using the modulators on silicon substrates for on-chip optical interconnects.
- （社）電子情報通信学会の論文
著者
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SHIMIZU Takanori
MIRAI-Selete
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OHASHI Keishi
MIRAI-Selete
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Nakada Masafumi
MIRAI-Selete
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Tsuda Hiroki
National Institute of Advanced Industrial Science and Technology (AIST)
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Miyazaki Hiroshi
MIRAI-Selete
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Akedo Jun
National Institute of Advanced Industrial Science and Technology (AIST)
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Akedo Jun
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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