Aerosol Deposition Method for Preparation of Lead Zirconate Titanate Thick Layer at Low Temperature : Improvement of Electrical Properties by Irradiation of Fast Atom Beam and Plasma
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-09-30
著者
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Lebedev M
National Institute Of Advanced Industrial Science And Technology (aist)
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Lebedev Maxim
National Institute Of Advanced Industrial Science And Technology (aist)
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Akedo Jun
National Institute of Advanced Industrial Science and Technology (AIST)
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Akedo Jun
National Institute Of Advanced Industrial Science And Technology
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Akedo Jun
Mechanical Engineering Laboratory Agency Of Industrial Science And Technology Ministry Of Internatio
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BABA So
National Institute of Advanced Industrial Science and Technology (AIST)
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Akedo J
National Institute Of Advanced Industrial Science And Technology (aist)
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Akedo Jun
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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