Actuation Properties of Lead Zirconate Titanate Thick Films Structured on Si Membrane by the Aerosol Deposition Method
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-09-30
著者
-
Lebedev Maxim
Mechanical Engineering Laboratory A.i.s.t M.i.t.i.:jst Cooperative Researcher
-
Akedo Jun
Mechanical Engineering Laboratory Agency Of Industrial Science And Technology Ministry Of Internatio
-
Akiyama Yoshikazu
R&D Center, RICOH Co., Ltd.
-
Akedo Jun
Mechanical Engineering Laboratory A.i.s.t M.i.t.i.
-
Akiyama Yoshikazu
R&D Center RICOH Co., Ltd.
関連論文
- Heat-cycle endurance and in-plane thermal expansion of Al_2O_3/Al substrates formed by aerosol deposition method
- Low-Temperature Sintering and Properties of (Pb, Ba, Sr)(Zr, Ti, Sb)O_3 Piezoelectric Ceramics Using Sintering Aids
- Patterning Properties of Lead Zirconate Titanate (PZT) thick Films Made by Aerosol Deposition
- Electro-Optical Properties of (Pb, La)(Zr, Ti)O_3 Films Prepared by Aerosol Deposition Method
- Aerosol Deposition Method for Preparation of Lead Zirconate Titanate Thick Layer at Low Temperature : Improvement of Electrical Properties by Irradiation of Fast Atom Beam and Plasma
- Aerosol Deposition on Transparent Electro-Optic Films for Optical Modulators(Micro/Nano Fabrication,Microoptomechatronics)
- Dielectric Characteristics of Ferroelectric Films Prepared by Aerosol Deposition in THz Range (Special Issue: Ferroelectric Materials and Their Applications)
- Electro-Optic Properties of Pb(Zr1-xTix)O3 (X=0,0.3,0.6) Films Prepared by Aerosol Deposition
- Electro-Optical Properties and Structures of (Pb, La)(Zr, Ti)O_3 and PbTiO_3 Films Prepared Using Aerosol Deposition Method
- X-Ray Diffraction and Scanning Electron Microscopy Observation of Lead Zirconate Titanate Thick Film Formed by Gas Deposition Method
- Hydroxyapatite Film Formation by Aerosol Deposition Method(Physics, Processes, Instruments & Measurements, INTERNATIONAL SYMPOSIUM OF JWRI 30TH ANNIVERSARY)
- Effect of Applied Magnetic Field on Magnetic Properties of Sm-Fe-N Films Prepared by Aerosol Deposition Method
- Microstructures and Magnetic Properties of Sm-Fe-N Thick Films Produced by the Aerosol Deposition Method
- Deposition and Patterning Technique for Realization of Pb(Zr_, Ti_)O_3 Thick Film Micro Actuator
- New Molding Technique Using Ultra-fine Particles for Realization of Three Dimensional Micro Structure (特集:MEMS技術)
- Deposition of Hydroxyapatite Film on Titanium by Ultra-fine Particle Beam(Physics, Processes, Instruments & Measurements)
- Enhancement of Piezoelectric Properties of Low-Temperature-Fabricated Pb(Mg_Nb_)O_3-PbZrO_3-PbTiO_3 Ceramics with LiBiO_2 Sintering Aid by Post-Annealing Process
- Low-Temperature Sintering of LiBiO2-Coated Pb(Mg1/3Nb2/3)O3-PbZrO3-PbTiO3 Powders Prepared by Surface Chemical Modification Method and Their Piezoelectric Properties
- Actuation Properties of Lead Zirconate Titanate Thick Films Structured on Si Membrane by the Aerosol Deposition Method
- Microstructure and Electrical Properties of Lead Zirconate Titanate (Pb(Zr_/Ti)O_3) Thick Films Deposited by Aerosol Deposition Method
- Piezoelectric and Dielectric Properties of (Bi,Na,K,Ag)TiO3–BaTiO3 Lead-Free Piezoelectric Ceramics
- Non-contact Air Holding Mechanism for Inspection of Pipe Inner Walls
- Periodic microstructures formation on plastic plate by aerosol beam irradiation (溶射特集号)
- Application of Gas Jet Deposition Method to Piezoelectric Thick Film Miniature Actuator
- Enhancement of Piezoelectric Properties of Low-Temperature-Fabricated Pb(Mg1/3Nb2/3)O3-PbZrO3-PbTiO3 Ceramics with LiBiO2 Sintering Aid by Post-Annealing Process