Deposition and Patterning Technique for Realization of Pb(Zr_<0.52>, Ti_<0.48>)O_3 Thick Film Micro Actuator
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-12-30
著者
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Wang Z
Inst. Physics Chinese Acad. Of Sci. Beijing Chn
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Maeda R
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
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Akedo Jun
National Institute Of Advanced Industrial Science And Technology
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Akedo Jun
Mechanical Engineering Laboratory Agency Of Industrial Science And Technology Ministry Of Internatio
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ICHIKI Masaaki
National Institute of Advanced Industrial Science and Technology
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Chu J
Shanghai Inst. Of Technical Physics Chinese Acad. Of Sci. Shanghai Chn
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Chu Jiaru
Mechanical Engineering Laboratory Agency Of Industrial Science And Technology Ministry Of Internatio
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Chu J
Univ. Sci. And Technol. Of China Anhui Chn
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Ichiki M
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
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Akedo J
National Institute Of Advanced Industrial Science And Technology (aist)
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ICHIKI Masaaki
Mechanical Engineering Laboratory, Agency of Industrial Science and Technology, Ministry of Internat
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MAEDA Ryutaro
Mechanical Engineering Laboratory, Agency of Industrial Science and Technology, Ministry of Internat
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Wang Z
Atmi Inc. Connecticut Usa
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WANG Zhanjie
Mechanical Engineering Laboratory, Agency of Industrial Science and Technology, Ministry of Internat
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YONEKUBO So
Mechanical Engineering Laboratory, Agency of Industrial Science and Technology, Ministry of Internat
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Maeda Ryutaro
Mechanical Engineering Laboratory
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Yonekubo So
Mechanical Engineering Laboratory Agency Of Industrial Science And Technology Ministry Of Internatio
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Akedo Jun
Mechanical Engineering Laboratory A.i.s.t M.i.t.i.
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Ichiki Masaaki
Mechanical Engineering Laboratory, Agency of Industrial Science and Technology, Ministry
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