Design and Fabrication of 1D and 2D Micro Scanners Actuated by Double Layered Lead Zirconate Titanate (PZT) Bimorph Beams
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-06-30
著者
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Zhang L
Functional Materials Research Laboratory Tongji University
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Zhang Liangying
Electronic Materials Research Laoratory Xi'an Jiaotong University
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Maeda R
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
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MAEDA Ryutaro
National Institute of Advanced Industrial Science and Technology
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TSAUR Jiunnjye
National Institute of Advanced Industrial Science and Technology
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ZHANG Lulu
National Institute of Advanced Industrial Science and Technology
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Zhang Liangying
Functional Materials Research Laboratory Tongji University
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Zhang L
National Institute Of Advanced Industrial Science And Technology
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Matsumoto Sohei
National Institute Of Advanced Industrial Science And Technology Integrated Solid-state Electra Mech
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Maeda Ryutaro
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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KHUMPUANG Sommawan
National institute of Advanced industrial Science and Technology integrated Solid-state Electra Mech
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Tsaur Jiunnjye
National Institute Of Advanced Industrial Science And Technology Integrated Solid-state Electra Mech
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Zhang L
Institute Of Mechanical System Engineering National Institute Of Advanced Industrial Science And Tec
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Khumpuang Sommawan
National Institute Of Advanced Industrial Science And Technology Integrated Solid-state Electra Mech
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Khumpuang Sommawan
National Institute Of Advance Industrial Science And Technology (aist)
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Tsaur Jiunjye
National institute of Advanced industrial Science and Technology integrated Solid-state Electra Mechanical Instruments
関連論文
- Inductively Coupled Plasma Reactive Ion Etching of Lead Zirconate Titanate Thin Films for MEMS Application
- Magnesium-Ion Indiffusion to Lithium Niobate Single-Crystal Fiber with MgF_2 as Diffusion Source
- Formation Mechanism for High-Surface-Area Anatase Titania Nanoparticles Prepared by Metalorganic Chemical Vapor Deposition
- Magnetoresistance of Annealed CoNb/Cu Multilayers with Amorphous CoNb Magnetic Layers
- Preparation and Characterization of Lead Zirconate Titanate Thin Films Derived by Hybrid Processing: Sol-Gel Method and Pulsed Laser Deposition
- Preparation and Application of Lead Zirconate Titanate (PZT) Films Deposited by Hybrid Process : Sol-Gel Method and Laser Ablation
- Electrical Properties and Microstructure of Lead Zirconate Titanate Thin Film In Situ Grown by Hybrid Processing : Sol-Gel Method and Pulsed Laser Deposition
- Effect of Zr/Ti Ratio in Targets on Electrical Properties of Lead Zirconate Titanate Thin Films Derived by Pulsed Laser Deposition on Template Layer
- Microstructure and Electrical Properties of Lead Zirconate Titanate Thin Films Deposited by Excimer Laser Ablation
- Characteristics of Photovoltaic Lead Lanthanum Zirconate Titanate Ceramics in a Layered Film Structure Design
- The Magnesium Diffused Layer Characteristics of a Lithium Niobate Single Crystal with Magnesium-Ion Indiffusion
- Effect of Collection Distance on the Lattice Structure of Anatase Titania Nanoparticles Prepared by Metalorganic Chemical Vapor Deposition : Structure and Mechanical and Thermal Properties of Condensed Matter
- High Anatase-Rutile Transformation Temperature of Anatase Titania Nanoparticles Prepared by Metalorganic Chemical Vapor Deposition : Structure and Mechanical and Thermal Properties of Condensed Matter
- X-Ray Diffraction and Scanning Electron Microscopy Observation of Lead Zirconate Titanate Thick Film Formed by Gas Deposition Method
- Room-Temperature Bonding of Si Wafers to Pt Films on SiO_2 or LiNbO_3 Substrates Using Ar-Beam Surface Activation
- Transmission Electron Microscope Observations of Si/Si Interface Bonded at Room Temperature by Ar Beam Surface Activation
- Effect of Surface Roughness on Room-Temperature Wafer Bonding by Ar Beam Surface Activation
- Microfabricated Dynamic Scanning Force Microscope Using a Three Dimensional Piezoelectric T-shape Actuator
- Tip-Scanning Dynamic Force Microscope Using Piezoelectric Cantilever for Full Wafer Inspection
- PZT Film Formation With Use of Spray Coating Method
- Lead Zirconate Titanate Film Formation Technology with Spray Coating Method
- Pulsed Laser Deposited Lead Zirconate Titanate Thin Films for Micro Actuators
- Design and Fabrication of 1D and 2D Micro Scanners Actuated by Double Layered Lead Zirconate Titanate (PZT) Bimorph Beams
- Heat Flow and Detectivity of Multilayer Thin-Film Pyroelectric Detector
- Measurements of Piezoelectric Coefficient of Pb(Zr,Ti)O_3 Thin Film Using a Piezoelectric Microcantilever
- Deposition and Patterning Technique for Realization of Pb(Zr_, Ti_)O_3 Thick Film Micro Actuator
- New Molding Technique Using Ultra-fine Particles for Realization of Three Dimensional Micro Structure (特集:MEMS技術)
- Residual Stress Study of SiO_2/Pt/Pb(Zr,Ti)O_3/Pt Multilayer Structure for Micro Electro Mechanical System Applications
- Infrared-Blocking Filters for Superconducting-Tunnel-Junction Particle Detector
- Piezoelectric Optical Micro Scanner with Built-in Torsion Sensor
- Micro Hot Embossing for Replication of Microstructures
- Sensing Property of Self-Sensitive Piezoelectric Microcantilever Utilizing Pb(Zr0.52/Ti0.48)O3 Thin Film and LaNiO3 Oxide Electrode
- Bring notable beauties into life science (世界化学年記念特集--キューリー夫人ノーベル賞受賞100周年記念)
- Analysis of Stress in Plasma Enhanced Chemical Vapor Deposition Silicon Nitride Film Irradiated with Ultraviolet Light
- Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices
- Preparation and Characterization of Lead Zirconate Titanate Thin Films Derived by Hybrid Processing: Sol-Gel Method and Pulsed Laser Deposition
- Tunable Optical Microscanner Driven by Piezoelectric Actuator
- Microelectromechanical Systems-Based Electrostatic Field Sensor Using Pb(Zr,Ti)O3 Thin Films
- Electrical Properties and Microstructures of Sol-Gel-Deposited Lead Zirconate Titanate Thin Films Crystallized by 28 GHz Microwave Irradiation
- Fabrication of Optical Micro Scanner Driven by PZT Actuators
- Numerical and Experimental Analysis of Intermittent Line-and-Space Patterns in Thermal Nanoimprint
- Electrical Properties and Microstructure of Lead Zirconate Titanate Thin Film In Situ Grown by Hybrid Processing:Sol-Gel Method and Pulsed Laser Deposition
- Pulsed Laser Deposited Lead Zirconate Titanate Thin Films for Micro Actuators
- Formation Mechanism for High-Surface-Area Anatase Titania Nanoparticles Prepared by Metalorganic Chemical Vapor Deposition
- Piezoelectric Optical Micro Scanner with Built-in Torsion Sensors