Piezoelectric Optical Micro Scanner with Built-in Torsion Sensor
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概要
- 論文の詳細を見る
- 2006-09-13
著者
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MAEDA Ryutaro
National Institute of Advanced Industrial Science and Technology
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KOBAYASHI Takeshi
National Research Institute for Metals
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Maeda Ryutaro
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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Kobayashi Takeshi
National Institute Of Advanced Industrial Science And Technology
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Kobayashi Takeshi
National Institute For Materials Science
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