Numerical and Experimental Analysis of Intermittent Line-and-Space Patterns in Thermal Nanoimprint
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概要
- 論文の詳細を見る
Time-evolutional analyses of an intermittent line-and-space patterning in thermal nanoimprint were performed both experimentally and numerically. The constitutive model of polymers in finite element numerical analyses was a viscoelastic model based on the generalized Maxwell model and the Williams–Landel–Ferry (WLF) law so that polymer deformation was strain-history and temperature dependent. We performed uniaxial vibrational tests and numerical inverse analyses to identify material properties of the viscoelastic model for cyclo-olefin-polymer (COP). We also carried out a series of experiments and numerical simulations of an intermittent line-and-space patterning at various pressure-holding times. Both experiments and simulations presented characteristic polymer deformation which never appear in continuous line-and-space patterning. The numerical simulation well agreed with experiments and revealed complicated distributions of stress and pressure during the imprinting that were difficult to be directly observed in thermal nanoimprint experiments.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-06-25
著者
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Takagi Hideki
National Inst. Of Advanced Industrial Sci. And Technol.
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Iriye Yasuroh
Mizuho Information & Research Institute Inc.
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Takahashi Masaharu
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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Maeda Ryutaro
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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Hirai Yoshihiko
Physics And Electronics Engineering Osaka Prefecture University
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Maeda Ryutaro
National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba-East, 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan
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Onishi Yuki
Mizuho Information and Research Institute, Inc., 2-3 Kandanishikicho, Chiyoda-ku, Tokyo 101-8443, Japan
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Tanabe Toshiaki
Physics and Electronics Engineering, Osaka Prefcure University, 1-1 Gakuencho, Naka-ku, Sakai 599-8531, Japan
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Takahashi Masaharu
National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba-East, 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan
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Hirai Yoshihiko
Physics and Electronics Engineering, Osaka Prefcure University, 1-1 Gakuencho, Naka-ku, Sakai 599-8531, Japan
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Iriye Yasuroh
Mizuho Information and Research Institute, Inc., 2-3 Kandanishikicho, Chiyoda-ku, Tokyo 101-8443, Japan
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Takagi Hideki
National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba-East, 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan
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