Electrostatic Imprint Process for Glass
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概要
- 論文の詳細を見る
In usual thermal imprint process, mold patterns are transferred by applying mechanical pressures at elevated temperatures. We have developed a new imprint process for glass, which utilizes electrostatic force as a driving force for deformation. In the method, high dc voltage is applied between a mold and a glass specimen so that the mold becomes an anode. This method enables glass forming at lower temperatures with smaller mechanical force compared to usual thermal imprint process. In addition, this method is suitable for small patterns less than 1 μm. It is expected that this method realizes large-area and high-efficiency nano-forming process for glass.
- Japan Society of Applied Physicsの論文
- 2008-02-25
著者
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TAKAGI Hideki
National Institute of Advanced Industrial Science and Technology
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Takagi Hideki
National Inst. Of Advanced Industrial Sci. And Technol.
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MAEDA Ryutaro
Advanced Manufacturing Research Institute, National Instititue of Advanced Industrial Science and Te
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Miyazawa Shin-ichi
Advanced Manufacturing Research Institute National Institute Of Advanced Industrial Science And Tech
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TAKAHASHI Masaharu
Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Tec
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Maeda Ryutaro
Advanced Manufacturing Research Institute National Institute Of Advanced Industrial Science And Tech
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Maeda Ryutaro
Advanced Manufacturing Research Institute National Institute Of Advanced Industrial Science And Tech
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Takahashi Masaharu
Advanced Manufacturing Research Institute National Institute Of Advanced Industrial Science And Tech
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Takagi Hideki
Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Tec
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