P-MNS-07 NANOTRANSFER METHOD FOR THE FERROELECTRIC FILMS ONTO THE POLYMER SUBSTRATE(Micro/Nanosystem Science and Technology,Technical Program of Poster Session)
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概要
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High dielectric capacitor, that has around 1000 in dielectric constant, can be successfully formed by nanotransfer on non-heat-resisting substrates. PZT film could be released from the Si substrate and bonded onto the polymer one. The releasing characteristics have the relationships with the thickness of Pt layer. The formed PZT has perovskite structure and clear columnar texture.
- 2009-06-17
著者
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Ichiki Masaaki
Department Of Precision Engineering Graduate School Of Engineering The University Of Tokyo:jst-crest
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SUGA Tadatomo
Department of Precision Engineering, School of Engineering, The University of Tokyo
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MAEDA Ryutaro
Advanced Manufacturing Research Institute, National Instititue of Advanced Industrial Science and Te
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Suga Tadatomo
Department Of Precision Engineering Graduate School Of Engineering The University Of Tokyo
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MAKINO Sho
Department of Precision Engineering, Graduate School of Engineering, the University of Tokyo
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Maeda Ryutaro
Advanced Manufacturing Research Institute National Institute Of Advanced Industrial Science And Tech
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Makino Sho
Department Of Precision Engineering Graduate School Of Engineering The University Of Tokyo
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Suga Tadatomo
Department Of Precision Engineering Faculty Of Engineering University Of Tokyo
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Maeda Ryutaro
Advanced Manufacturing Research Institute (AMRI), National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan
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