Nanoimprint of Glass Materials with Glassy Carbon Molds Fabricated by Focused-Ion-Beam Etching
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-07-30
著者
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SUGIMOTO Kohichi
Department of Mechanical Systems Engineering, Shinshu University
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MAEDA Ryutaro
Advanced Manufacturing Research Institute, National Instititue of Advanced Industrial Science and Te
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Maeda Ryutaro
National Institute Of Advanced Industrial Science And Technology (aist)
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TAKAHASHI Masaharu
Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Tec
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