RF Micro-Electro-Mechanical Systems Capacitive Switches Using Ultra Thin Hafnium Oxide Dielectric
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
著者
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Zhang Yi
National Institute Of Advanced Industrial Science And Technology (aist)
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Maeda Ryutaro
National Institute Of Advanced Industrial Science And Technology (aist)
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