Micromachined Silicon Disk Resonator Transduced by Piezoelectric Lead Zirconate Titanate Thin Films

スポンサーリンク

概要

• 論文の詳細を見る

• Piezoelectrically transduced microelectromechanical system (MEMS) devices are promising candidates for use in distributed wireless sensor networks (WSN) to their low driving voltage and various sensing actuation capabilities. In this paper, we present a micromachined silicon disk resonator with on-disk piezoelectric lead zirconate titanate (PZT) thin films as both the actuator and sensor for human healthcare and safety applications. The resonator shows preferred system integration compatibilities, and the negative effects of the PZT-electrode stacks were compressed. A high quality factor was achieved both in air (${\sim}1{,}300$) and under vacuum (${\sim}5{,}000$). The effects of through-hole and other parameters on device sensitivity were examined and discussed in this paper.

• 2010-06-25

著者

• Zhang Yi

  National Institute Of Advanced Industrial Science And Technology (aist)

• Lu Jian

  School Of Science Nanjing University Of Science And Technology

• Suga Tadatomo

  School Of Engineering The Univ. Of Tokyo

• Takashi Mihara

  Future Creation Laboratory, Olympus Corporation, 2-3 Kuboyamacho, Hachioji, Tokyo 192-8512, Japan

• Jian Lu

  School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-0033, Japan

• Ryutaro Maeda

  National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan

• Toshihiro Itoh

  National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan

• Tadatomo Suga

  School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-0033, Japan

• Yi Zhang

  National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan

関連論文

• Inductively Coupled Plasma Reactive Ion Etching of Lead Zirconate Titanate Thin Films for MEMS Application
• Room-temperature bonding of GaN to Al using Ar-beam surface activation (特集 マイクロ加工および支援技術)
• Hydrogen Permeation of Thin Pd-25Ag Membranes Prepared by Cold Rolling and Microsystem Technology
• High-k dielectrics for application in broadband radio frequency-microelectromechanical system capacitive shunt switch (特集 強誘電体のセンサ・マイクロマシン応用)
• High quality factor silicon cantilever transduced by piezoelectric lead zirconate titanate film for mass sensing applications
• Characterization and Permeation of Microfabricated Palladium Membrane
• Energy Dissipation Mechanisms in Lead Zirconate Titanate Thin Film Transduced Micro Cantilevers
• RF Micro-Electro-Mechanical Systems Capacitive Switches Using Ultra Thin Hafnium Oxide Dielectric
• Low-Temperature Direct Bonding of Flip-Chip Mountable VCSELs with Au-Au Surface Activation
• Real-time Observation of Hydrogen Plasma Reflow Process with Lead-free Solder Pastes
• Micromachined Silicon Disk Resonator Transduced by Piezoelectric Lead Zirconate Titanate Thin Films
• Fabrication of 150-nm-Wide Transducer Gaps for Disk-Type Resonators by Single Dry Etching Process
• Finite Element Analysis of the Scanning Laser Line Source Technique
• Optical Microsensors Integration Technologies for Biomedical Applications
• Room-Temperature Bonding of Vertical-Cavity Surface-Emitting Laser Chips on Si Substrates Using Au Microbumps in Ambient Air
• Low-Temperature Au-to-Au Bonding for LiNbO_3/Si Structure Achieved in Ambient Air(Micro/Nano Fabrication,Microoptomechatronics)
• Studies on Molecular Structure of Ethanol-Water Clusters by Fluorescence Spectroscopy
• Fiber-Based Optical Deflection Sensor for Laser Induced Leaky Waves at Air–Solid Interfaces

もっと見る 閉じる

スポンサーリンク