Optical Microsensors Integration Technologies for Biomedical Applications
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概要
- 論文の詳細を見る
This paper focuses on optical integration technology and its application in optical microsensors used in biomedical fields. The integration is based on the hybrid integration approach, achieving high performance, small size and weight, and lower cost. First, we describe the key technologies used in hybrid integration, namely passive alignment technology, low temperature bonding technology, and packaging technology for realizing advanced microsensors. Then, we describe an integrated laser Doppler flowmeter that can monitor blood flow in human skin.
- （社）電子情報通信学会の論文
- 2009-02-01
著者
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Suga Tadatomo
The Univ. Of Tokyo Dept. Of Precision Eng. School Of Eng.
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Higurashi Eiji
Res. Center For Advanced Sci. And Technol. The Univ. Of Tokyo
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Higurashi Eiji
The University Of Tokyo
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Suga Tadatomo
School Of Engineering The Univ. Of Tokyo
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SAWADA Renshi
Kyushu University
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