Tunable Optical Microscanner Driven by Piezoelectric Actuator
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概要
- 論文の詳細を見る
In this study, we developed a tunable piezoelectric optical microscanner. The characteristic of the present microscanner is that the Pb(Zr,Ti)O3 film is formed on the torsion hinges of the scanner and the hinges act as a tuner themselves. DC voltage applied to the tuner varies the resonant frequency of the rotation of the mirror. A laser displacement meter measures the resonant frequencies to be 6457 Hz for no tuning and 6471 Hz for 15 V tuning. The resonant frequency with tuning between 0 and 15 V shows a hysteresis curve. Moreover, tuning between $-15$ and 15 V results in the butterfly curve of resonant frequency. The scanning angle under resonant actuation at 6457 Hz is decreased from 5.6 to 5.0° by applying a DC voltage of 15 V to the tuner. The result is in good agreement with the displacement of the edge of the mirror measured using the laser displacement meter.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-09-30
著者
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Maeda Ryutaro
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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SAWADA Renshi
Kyushu University
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Kobayashi Takeshi
National Institute For Materials Science
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Itoh Toshihiro
University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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Sawada Renshi
Kyushu University, Motooka, Nishi-ku, Fukuoka 819-0395, Japan
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