In-Plane Lattice Strain Evaluation in Piezoelectric Microcantilever by Two-Dimensional X-ray Diffraction

概要

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Two-dimensional X-ray diffraction (XRD2) was applied to the in-plane strain evaluation of the piezoelectric microcantilever fabricated from the (001)-/(100)-oriented Pb(Zr0.52,Ti0.48)O3 film deposited on a (001)c LaNiO3/(111) Pt/TiO2/SiO2/Si/SiO2/(001) Si substrate under the applied voltage. In-plane lattice parameters were estimated using XRD2 results with two different diffractions originated from PZT, surface normal 002/200 diffractions at $\chi = 0$ and 45° rotated 101/110 diffractions from surface normal ($\chi = 45$°). The out-of-plane and in-plane lattice parameters were linearly increased and decreased by increasing the applied voltage, regardless of the $a$- and $c$-axes. A significant 90°-domain rotation from the $a$-domain to the $c$-domain was not observed in the microcantilever. The calculated transverse piezoelectric constants ($d_{31}$) based on the in-plane strain, curvature, and $z$-displacement indicated similar values of about $-140\pm 10$ pm/V. This result shows that the in-plane lattice strain mainly contributed to the displacement of the cantilever.
2008-09-25