In-situ observation of a MEMS-based Pb(Zr,Ti)O3 micro cantilever using micro-Raman spectroscopy
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概要
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The crystal structure and strain in a (100)/(001)-oriented PZT micro cantilever under applied voltage were characterized by in-situ Raman spectroscopy. A Pt/LaNiO3/(100)/(001)PZT/LaNiO3/Pt/Ti/SiO2/silicon-on-insulator (SOI) multilayer structure was fabricated in a process based on a microelectromechanical system (MEMS). The volume fraction of the domain switching from a-domains to c-domains was monotonously increased with increases in the applied voltage. No compressive in-plane lattice strain was induced in the PZT film with the increases in the applied voltage. These results show that Raman spectroscopy is a useful method for in-situ observation of PZT micro cantilevers.
著者
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Morioka Hitoshi
Application Scientist Xrd For Thin Film Bruker Axs K.k.
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Funakubo Hiroshi
Department Of Innovative And Engineered Materials
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Nishida Ken
Department Of Electronic And Photonic Systems Engineering Kochi University Of Technology
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Katoda Takashi
Department Of Electronic And Photonic Systems Engineering Kochi University Of Technology
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Yamamoto Takashi
Department Of Cardiology Tokushima Prefectural Central Hospital
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NISHIDE Masamichi
Department of Communications Engineering, National Defense Academy
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KUZUHARA Maresuke
Department of Electronic and Photonic Systems Engineering, Kochi University of Technology
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TAI Takeshi
Department of Electronic and Photonic Systems Engineering, Kochi University of Technology
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Yamamoto Takashi
Department Of Applied Chemistry Faculty Of Engineering Ehime University
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Nishide Masamichi
Department of Communicating Engineering, National Defense Academy, Yokosuka, Kanagawa 239-8686, Japan
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Morioka Hitoshi
Application Laboratory
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Yamamoto Takashi
Department of Communications Engineering, National Defense Academy
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FUNAKUBO Hiroshi
Department of Innovative and Engineered Materials, Tokyo Institute of Technology
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MORIOKA Hitoshi
Application Scientist XRD for Thin Film, Bruker AXS K.K.
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NISHIDA Ken
Department of Communications Engineering, National Defense Academy
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Nishida Ken
Department of Communicating Engineering, National Defense Academy, Yokosuka, Kanagawa 239-8686, Japan
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Tai Takeshi
Department of Communicating Engineering, National Defense Academy, Yokosuka, Kanagawa 239-8686, Japan
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Funakubo Hiroshi
Department of Innovative and Engineered Material, Tokyo Institute of Technology, Yokohama 226-8503, Japan
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Katoda Takashi
Department of Electronic and Photonic System Engineering, Kochi University of Technology, 185 Tosayamada-cho, Kami, Kochi 782-8502, Japan
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