Crystal Orientation Control of Bismuth Layer-Structured Dielectric Films Using Interface Layers of Perovskite-Type Oxides

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概要

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• Thin films of SrBi₄Ti₄O₁₅, a kind of bismuth layer-structured dielectrics (BLSDs), were prepared on platinized silicon wafers buffered by perovskite-type oxide interface layers, (100)LaNiO₃/(111)Pt/TiO₂/(100)Si and (001)Ca₂Nb₃O₁₀-nanosheets/(111)Pt/TiO₂/(100)Si, by chemical solution deposition (CSD). The Ca₂Nb₃O₁₀ nanosheets were supported on a (111)Pt/TiO₂/(100)Si substrate by dip coating using an aqueous dispersion, while (100)LaNiO₃ was prepared by CSD. The ($00l$) planes of BLSD crystal were preferentially oriented on the surface of both substrates, which is caused by suitable lattice matching between the $a$-($b$-)axis of BLSD and perovskite-type oxide layers. The film deposition on (001)Ca₂Nb₃O₁₀ nanosheets yielded (001)-oriented BLSD films with higher crystallinity and smaller fluctuation in the tilting angle of the (001)BLSD plane than those on the (100)LaNiO₃ interface layer. The dielectric constant ($\varepsilon_{\text{r}}$) of (001)-oriented SrBi₄Ti₄O₁₅ film on (001)Ca₂Nb₃O₁₀-nanosheets/(111)Pt/TiO₂/(100)Si substrate was approximately 190, which was significantly stable against the change of frequency and bias voltage compared with that of the randomly-oriented SrBi₄Ti₄O₁₅ film.

• 2011-09-25

著者

• Funakubo Hiroshi

  Department Of Innovative And Engineered Materials

• Ehara Yoshitaka

  Department Of Engineering In Applied Chemistry Faculty Of Engineering And Resource Science Akita Uni

• KIMURA Junichi

  Department of Chemistry, Nagoya University

• Uchida Hiroshi

  Department Of Anesthesia Tottori Prefectural Central Hospital

• Uchida Hiroshi

  Department of Materials and Life Sciences, Sophia University, Chiyoda, Tokyo 102-8554, Japan

• Kondoh Yohta

  Department of Materials and Life Sciences, Sophia University, Chiyoda, Tokyo 102-8554, Japan

• Sasajima Keiichi

  Department of Materials and Life Sciences, Sophia University, Chiyoda, Tokyo 102-8554, Japan

• Hayashi Mari

  Department of Materials and Life Sciences, Sophia University, Chiyoda, Tokyo 102-8554, Japan

• Takuwa Itaru

  Department of Innovative and Engineered Materials, Tokyo Institute of Technology, Yokohama 226-8503, Japan

• Funakubo Hiroshi

  Department of Innovative and Engineered Materials, Tokyo Institute of Technology, Yokohama 226-8503, Japan

• Kimura Junichi

  Department of Innovative and Engineered Materials, Tokyo Institute of Technology, Yokohama 226-8503, Japan

• Ehara Yoshitaka

  Department of Innovative and Engineered Materials, Tokyo Institute of Technology, Yokohama 226-8503, Japan

• Funakubo Hiroshi

  Department of Innovative and Engineered Material, Tokyo Institute of Technology, Yokohama 226-8503, Japan

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