Growth of Epitaxial β-FeSi_2 Thin Film on Si(001) by Metal-Organic Chemical Vapor Deposition

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概要

• 論文の詳細を見る
• Japan Society of Applied Physicsの論文
• 2004-04-15

著者

• FUNAKUBO Hiroshi

  Department of Innovative and Engineered Materials, Interdisciplinary Graduate School, Tokyo Institut

• Kimura Takeshi

  Department of Cardiovascular Medicine, Kyoto University Hospital

• Funakubo H

  Dep. Of Innovative And Engineered Materials Tokyo Inst. Of Technol.

• Funakubo H

  Tokyo Inst. Technol. Yokohama Jpn

• Katoda Takashi

  Dep. Of Electronic And Photonic Systems Engineering Kochi Univ. Of Technol.

• Funakubo Hiroshi

  Department Of Innovative And Engineered Materials

• Kimura Takeshi

  Department Of Cardiology Kobe City Medical Center General Hospital

• AKIYAMA Kensuke

  Kanagawa Industrial Technology Research Institute

• SUEMASU Takashi

  Institute of Applied Physics, University of Tsukuba

• HASEGAWA Fumio

  Institute of Applied Physics, University of Tsukuba

• MAEDA Yoshihito

  Department of Energy Science and Technology, Kyoto University

• 舟窪 浩

  東工大院総合理工学研究科

• Fujisawa Hironori

  Department Of Electrical Electronic And Computer Engineering Graduate School Of Engineering Hitneji

• Yoshimoto Masahiro

  Department Of Electronic Science And Engineering Faculty Of Engineering Kyoto University

• Takahashi K

  Dep. Of Electronic And Photonic Systems Engineering Kochi Univ. Of Technol.

• Akiyama K

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Maeda Yoshihito

  Department Of Energy Science And Technology Kyoto University

• Maeda Yoshihito

  Department Of Electronic Engineering University Of Surrey

• Hasegawa Fumio

  Institute Of Applied Physics University Of Tsukuba

• Hasegawa Fumio

  Institute Of Materials Science University Of Tsukuba

• Yoshimoto M

  Kyoto Inst. Technol. Kyoto Jpn

• Suemasu Takashi

  Institute Of Applied Physics University Of Tsukuba

• Suemasu Takashi

  Institute Of Materials Science University Of Tsukuba

• 藤沢 浩訓

  Dep. Of Innovative And Engineered Materials Tokyo Inst. Of Technol.

• SUEMASU Takashi

  Institlite of Materials Science, University of Tsukuba

• Akiyama Kensuke

  Kanagawa Industrial Technology Center, 705-1 Shimoimaizumi, Ebina, Kanagawa 243-0435, Japan

• HASEGAWA Fumio

  Institlite of Materials Science, University of Tsukuba

• Funakubo Hiroshi

  Department of Innovative and Engineered Material, Tokyo Institute of Technology, Yokohama 226-8503, Japan

• KIMURA Takeshi

  Department of Applied Chemistry and Molecular Science, Faculty of Engineering, Iwate University

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