Highly-Reproducible Preparation of Pb(Zr,Ti)O_3 Films at Low Deposition Temperature by Metal Organic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-05-15
著者
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FUNAKUBO Hiroshi
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School, Tokyo Institut
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Funakubo Hiroshi
Department Of Innovative And Engineered Materials Interdisciplinary Graduate School Of Science And E
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ASANO Gouji
Department of Innovative and Engineered Materials, Tokyo Institute of Technology
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OIKAWA Takahiro
Department of Innovative and Engineered Materials, Tokyo Institute of Technology
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