Preparation and Characterization of SrBi_2(Ta_<1-x>Nb_x)_2O_9 Thin Films by Metalorganic Chemical Vapor Deposition from Two Organometallic Source Bottles
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概要
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SrBi_2(Ta_<1-x>Nb_x)_2O_9 (SBTN) thin films were first prepared on Pt/Ti/SiO_2/Si substrates by metalorganic chemical vapor deposition (MOCVD) with high compositional reproducibility. Bi(CH_3)_3, a mixture of Sr[Ta(O・C_2H_5)_6]_2 and Sr[Nb(O・C_2H_5)_6]_2, and O_2 gas were used as sources. The Nb/(Ta+Nb) ratio in the film was almost the same as that of the source materials. The film, deposited at 500℃ following heat treatment at 800℃ for 30 min in O_2 atmosphere, consisted of an almost single phase of SBTN. The remanent polarization and the coercive field of the 330 nm-thick film were 8.5 μC/cm^2 and 91 kV/cm, respectively. This film showed negligible fatigue after 5×10^<10> polarization switching cycles.
- 社団法人応用物理学会の論文
- 2000-06-15
著者
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NUKAGA Norimasa
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School, Tokyo Institut
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FUNAKUBO Hiroshi
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School, Tokyo Institut
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MITSUYA MASATOSHI
Department of Radiology, Tohoku University School of Medicine
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石川 賢司
静大電子研
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Ishikawa K
Department Of Organic And Polymeric Materials Tokyo Institute Of Technology
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石川 賢司
Shinshu Univ. Nagano Jpn
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石川 賢司
四日市大学総合政策学部
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Funakubo Hiroshi
Department Of Innovative And Engineered Materials
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Fujisawa Hironori
Department Of Electrical Electronic And Computer Engineering Graduate School Of Engineering Hitneji
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ISHIKAWA Katsuyuki
Department of Innovative and Engineered Materials, Tokyo Institute of Technology
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Mitsuya Masatoshi
Department Of Innovative And Engineered Materials
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Mitsuya Masatoshi
Kanagawa Industrial Technology Research Institute
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Nukaga N
Department Of Innovative And Engineered Materials Interdisciplinary Graduate School Tokyo Institute
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Nukaga Norimasa
Department Of Innovative And Engineered Materials Interdisciplinary Graduate School Of Science And E
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Mitsuya Masatoshi
Kanagawa Industrial Technology Center
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Ishikawa Katsuyuki
Department Of Innovative And Engineered Materials Graduated School Of Science And Engineering Tokyo
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Nukaga Norimasa
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School, Tokyo Institute of Technology
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Funakubo Hiroshi
Department of Innovative and Engineered Material, Tokyo Institute of Technology, Yokohama 226-8503, Japan
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