Film Thickness Dependence of Dielectric Property and Crystal Structureof PbTiO_3 Film Prepared on Pt/SiO_2/Si Substrate by Metal Organic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-09-30
著者
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FUNAKUBO Hiroshi
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School, Tokyo Institut
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Funakubo H
Dep. Of Innovative And Engineered Materials Tokyo Inst. Of Technol.
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Funakubo H
Tokyo Inst. Technol. Yokohama Jpn
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Funakubo Hiroshi
Department Of Innovative And Engineered Materials Interdisciplinary Graduated School Of Science And
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Funakubo Hiroshi
Department Of Innovative And Engineered Materials
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MIZUTANI Nobuyasu
Department of Inorganic Materials, Faculty of Engineering, Tokyo Institute of Technology
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SHINOZAKI Kazuo
Department of Metallurgy and Ceramics Science
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Shinozaki K
Tokyo Inst. Technol. Tokyo Jpn
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Shinozaki Kazuo
Laboratory Of Plant Molecular Biology The Insitute Of Physical And Chemical Research(riken)
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HIOKI Tsuyoshi
Department of Inorganic Materials, Faculty of Engineering, Tokyo Institute of Technology
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OTSU Masato
Department of Inorganic Materials, Faculty of Engineering, Tokyo Institute of Technology
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舟窪 浩
東工大院総合理工学研究科
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Shinozaki Kazuo
Department Of Biology Faculty Of Science Osaka University
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Shinozaki K
Laboratory Of Plant Molecular Biology The Insitute Of Physical And Chemical Research(riken)
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Otsu M
Tokyo Inst. Technology Tokyo
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Hioki T
Tokyo Inst. Technol. Tokyo
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Mizutani N
Tokyo National College Of Technology
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Mizutani Nobuyasu
Department Of Inorganic Materials Faculty Of Engineering Tokyo Institute Of Technology
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Otsu Masato
Department Of Applied Chemistry Tokyo University Of Agriculture And Technology
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Mizutani Nobuyasu
Tokyo National Coll. Of Technol. Tokyo Jpn
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Hioki Tsuyoshi
Department Of Inorganic Materials Faculty Of Engineering Tokyo Institute Of Technology
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Funakubo Hiroshi
Department of Innovative and Engineered Material, Tokyo Institute of Technology, Yokohama 226-8503, Japan
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