Effect of Deposition Temperature and Composition on the Microstructure and Electrical Property of SrBi_2Ta_2O_9 Thin Films Prepared by Metalorganic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
SrBi_2Ta_2O_9 (SBT) thin films were prepared by conventional thermal metalorganic chemical vapor deposition (MOCVD) and subsequent heat treatment. The SBT film deposited at 500℃ had a smoother surface and better step coverage than that deposited at 750℃. The degree of step coverage deposited at 500℃ was 0.82. An almost single phase of SBT was obtained for the film with a Bi/Ta mole ratio of 1.0 by heat treatment at 750℃ for 30 min in O_2 atmosphere after MOCVD deposition at 500℃. 2P_r and E_C at an applied electric field of 620 kV/cm were 12.2 μC/cm^2 and 87 kV/cm, respectively, when the film was deposited at 500℃ followed by heat treatment at 800℃ for 30 min in O_2 atmosphere, and its Bi/Ta ratio was 1.2.
- 社団法人応用物理学会の論文
- 1999-09-30
著者
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NUKAGA Norimasa
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School, Tokyo Institut
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FUNAKUBO Hiroshi
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School, Tokyo Institut
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石川 賢司
静大電子研
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Funakubo H
Dep. Of Innovative And Engineered Materials Tokyo Inst. Of Technol.
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Funakubo H
Tokyo Inst. Technol. Yokohama Jpn
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Funakubo Hiroshi
Department Of Innovative And Engineered Materials Interdisciplinary Graduated School Of Science And
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Ishikawa K
Department Of Organic And Polymeric Materials Tokyo Institute Of Technology
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石川 賢司
四日市大学総合政策学部
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Funakubo Hiroshi
Department Of Innovative And Engineered Materials
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舟窪 浩
東工大院総合理工学研究科
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Fujisawa Hironori
Department Of Electrical Electronic And Computer Engineering Graduate School Of Engineering Hitneji
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ISHIKAWA Katsuyuki
Department of Innovative and Engineered Materials, Tokyo Institute of Technology
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Nukaga N
Department Of Innovative And Engineered Materials Interdisciplinary Graduate School Tokyo Institute
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Nukaga Norimasa
Department Of Innovative And Engineered Materials Interdisciplinary Graduate School Of Science And E
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Ishikawa Katsuyuki
Department Of Innovative And Engineered Materials Graduated School Of Science And Engineering Tokyo
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Nukaga Norimasa
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School, Tokyo Institute of Technology
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Funakubo Hiroshi
Department of Innovative and Engineered Material, Tokyo Institute of Technology, Yokohama 226-8503, Japan
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