Preparation of SrBi_2Ta_2O_9 Thin Films Consisting of Uniform Grains at Low Temperature by Metalorganic Chemical Vapor Deposition : Electrical Properties of Condensed Matter
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-06-15
著者
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NUKAGA Norimasa
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School, Tokyo Institut
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FUNAKUBO Hiroshi
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School, Tokyo Institut
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Funakubo Hiroshi
Department Of Innovative And Engineered Materials
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SAITO Mami
Process & Manufacturing Engineering Center, Semiconductor Company, Toshiba Corporation
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OKUWADA Kumi
Process & Manufacturing Engineering Center, Semiconductor Company, Toshiba Corporation
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Okuwada Kumi
Process & Manufacturing Engineering Center Semiconductor Company Toshiba Corporation
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Nukaga Norimasa
Department Of Innovative And Engineered Materials Interdisciplinary Graduate School Of Science And E
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Funakubo Hiroshi
Department Of Innovative And Engineered Materials Interdisciplinary Graduate School Of Science And E
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Saito Mami
Process & Manufacturing Engineering Center, Semiconductor Company, Toshiba Corporation
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Funakubo Hiroshi
Department of Innovative and Engineered Material, Tokyo Institute of Technology, Yokohama 226-8503, Japan
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