Metalorganic Chemical Vapor Deposition of Epitaxial SrBi_2Ta_2O_9 Thin Films and Their Crystal Structure
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概要
- 論文の詳細を見る
Epitaxial SrBi_2Ta_2O_9 (SBT) thin films were grown by metalorganic chemical vapor deposition using Bi(CH_3)_3-Sr[Ta(O・C_2H_5)_6]_2-O_2 sources. The SBT phase with the c-axis oriented normal to the substrate and the fluorite phase with its a-axis oriented normal to the substrate could be deposited onto (100)SrTiO_3 and (100)yttria-stabilized zirconia (YSZ) substrates at 640 and 750℃, respectively. On the other hand, the films deposited onto (100)LaAlO_3 substrates consisted of the a-axis oriented fluorite phase together with the c-axis oriented SBT phase when the deposition temperature was greater than 640℃. These epitaxial relationships appear to be related to the crystal structure and lattice mismatch between the film and substrate.
- 社団法人応用物理学会の論文
- 1999-03-01
著者
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NUKAGA Norimasa
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School, Tokyo Institut
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FUNAKUBO Hiroshi
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School, Tokyo Institut
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石川 賢司
静大電子研
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Funakubo H
Dep. Of Innovative And Engineered Materials Tokyo Inst. Of Technol.
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Funakubo H
Tokyo Inst. Technol. Yokohama Jpn
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Funakubo Hiroshi
Department Of Innovative And Engineered Materials Interdisciplinary Graduated School Of Science And
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Ishikawa K
Department Of Organic And Polymeric Materials Tokyo Institute Of Technology
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石川 賢司
四日市大学総合政策学部
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Funakubo Hiroshi
Department Of Innovative And Engineered Materials
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舟窪 浩
東工大院総合理工学研究科
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Fujisawa Hironori
Department Of Electrical Electronic And Computer Engineering Graduate School Of Engineering Hitneji
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ISHIKAWA Katsuyuki
Department of Innovative and Engineered Materials, Tokyo Institute of Technology
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Nukaga N
Department Of Innovative And Engineered Materials Interdisciplinary Graduate School Tokyo Institute
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Nukaga Norimasa
Department Of Innovative And Engineered Materials Interdisciplinary Graduate School Of Science And E
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Ishikawa Katsuyuki
Department Of Innovative And Engineered Materials Graduated School Of Science And Engineering Tokyo
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Nukaga Norimasa
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School, Tokyo Institute of Technology
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Funakubo Hiroshi
Department of Innovative and Engineered Material, Tokyo Institute of Technology, Yokohama 226-8503, Japan
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