Fatigue Properties of Epitaxial Pb(Zr0.35Ti0.65)O3 Films with Various Volume Fractions of 90° Domains Grown on (100)cSrRuO3/(100)SrTiO3 Substrates
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概要
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(001)/(100)-oriented tetragonal epitaxial Pb(Zr0.35,Ti0.65)O3 [PZT] thin films with various volume fractions of 90° domains were grown on $\text{(100)$_{c}$SrRuO$_{3}$}\parallel\text{(100)SrTiO$_{3}$}$ substrates by metalorganic chemical vapor deposition. The polarization-electric field hysteresis curve and fatigue behavior of a PZT capacitor with Pt and SrRuO3 top electrodes were systematically investigated. In a Pt/PZT/SrRuO3 capacitor, the degradation of switching polarization occurred between $10^{4}$ and $10^{7}$ cycles. In contrast, a PZT capacitor with SrRuO3 top electrodes revealed almost fatigue-free behavior up to $10^{9}$ switching cycles. It was found that the fatigue properties of PZT films is strongly dependent on the type of top electrode, irrespective of the volume fraction of the (001) orientation. Moreover, it was also found that the $a$-domains switching of PZT thin films is independent of the fatigue properties.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-08-15
著者
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Funakubo Hiroshi
Department Of Innovative And Engineered Materials
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Morioka Hitoshi
Department Of Gynecology Saiseikai Shimonoseki General Hospital
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Kim Yong
Department And Research Institute Of Rehabilitation Medicine Yonsei University College Of Medicine
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Morioka Hitoshi
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, J2-43, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8502, Japan
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Funakubo Hiroshi
Department of Innovative and Engineered Material, Tokyo Institute of Technology, Yokohama 226-8503, Japan
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