A 100 kV Electron Gun for the X-Ray Mask Writer, EB-X2
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-12-30
著者
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Kato Junichi
Ntt Lsi Laboratories
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Kato Junichi
Ntt System Electronics Laboratories
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SAITO Kenichi
NTT System Electronics Laboratories
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SHIMAZU Nobuo
NTT System Electronics Laboratories
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SHIMAZU Nobuo
NTT LSI Laboratories
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Kato J
Ntt Telecommunications Energy Lab. Kanagawa Jpn
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SAITO Keisuke
Application Laboratory
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Kato J
Ntt Lsi Laboratories
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Saito Keisuke
Application Laboratory Analytical Division Philips Japan Ltd.
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Saito K
Institute Of Industrial Science University Of Tokyo
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Shimazu N
Ntt Lsi Lob. Kanagawa Jpn
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Saito Kunio
Ntt Microsystem Integration Laboratories
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SHIMAZU Akira
NTT System Electronics Laboratories
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Saito K
Akita Univ. Akita Jpn
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Saito Keisuke
Application Laboratory Bruker Axs
関連論文
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- Precise Delineation Characteristics of Advanced Electron Beam Mask Writer EB-X3 for Fabricating 1x X-Ray Masks
- Impact of 90ﾟ-Domain Wall Motion in Pb(Zr_Ti_)O_3 Film on the Ferroelectricity Induced by an Applied Electric Field
- Thick Epitaxial Pb(Zr_,Ti_)O_3 Films Grown on (100)CaF_2 Substrates with Polar-Axis-Orientation
- Unique Shapes of Micro-Pits Formed in an Al-Pd-Mn Icosahedral Quasicrystal by Anodic Etching
- Determination of Quasi-Crystallographic Orientations of Al-Pd-Mn Icosahedral Phase by Means of Light Figure Method
- Ferroelectric Property of a- /b-Axis- Oriented Epitaxial Sr_Bi_Ta_2O_9 Thin Films Grown by Metalorganic Chemical Vapor Deposition : Electrical Properties of Condensed Matter
- Structural Modulation in Oxygen Deficient Epitaxial Bi_2Sr_2Ca_1Cu_2O_X Observed by X-ray Reciprocal Space Mapping
- Epitaxial Yttria-stabilized Zirconia (YSZ) Film Deposited on Si(100) Substrate by YAG Laser
- Effect of Buffer Layer on Epitaxial Growth of YSZ Deposited on Si Substrate by Slower Q-switched 266nm YAG Laser
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- Preparation of BiSrCaCuO Multilayers by Use of Slower Q-Switched 266nm YAG Laser : Superconductors
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- Design and Lasing Operation of Micro-Arc-Ring Lasers
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- Crystal Structure Analysis of Metalorganic Chemical Vapor Deposition-β-FeSi_2 Thin Film by X-ray Diffraction Measurement
- Thermal Stability of SrRuO_3 Bottom Electrode and Electric Property of Pb(Zr, Ti)O_3 Thin Film Deposited on SrRuO_3
- Perovskite Single-Phase Growth of Epitaxial Pb(Zn_Nb_)O_3 Films by Alternative-Source-Gas-Introduced Metalorganic Chemical Vapor Deposition
- Quantitative Effects of Preferred Orientation and Impurity Phases of Ferroelectric Properties of SrBi_2(Ta_Nb_x)_2O_9 Thin Films Measured by X-Ray Diffraction Reciprocal Space Mapping
- Crystal Structure Refinement of (Pb_Ca_x)ZrO_3 by the Rietvelt Method
- Dielectric Properties of Pb-Based Perovskite Substituted by Ti for B-site at Microwave Frequencies
- Low-Fire Bismuth-Based Dielectric Ceramics for Microwave Use
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- MOCVD Preparation of Epitaxial SBT Films and Their Properties
- Proximity Effect Correction for X-Ray Mask Fabrication
- Fabrication and Characterization of Nd-Substituted Bi4Ti3O12 Thin Films with $a$- and $b$-Axis Orientations by High-Temperature Sputtering
- Synthesis of Mica Thin Film by Pulsed Laser Deposition
- Crystal Structure and Electrical Properties of Epitaxial BiFeO3 Thin Films Grown by Metal Organic Chemical Vapor Deposition
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- 金ナノ粒子を用いた三次元櫛形電極の作製とバイオセンシングヘの応用
- In-Plane Lattice Strain Evaluation in Piezoelectric Microcantilever by Two-Dimensional X-ray Diffraction
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- Quantitative Effects of Preferred Orientation and Impurity Phases on Ferroelectric Properties of SrBi2(Ta1-xNbx)2O9 Thin Films Measured by X-Ray Diffraction Reciprocal Space Mapping
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- Non-volatile Al2O3 Memory using Nanoscale Al-rich Al2O3 Thin Film as a Charge Storage Layer
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