Basic Characteristics of Beam Position Drift and Field Stitching Error Caused by Electron Beam Column Charging

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1996-07-15

著者

• Kato Junichi

  Ntt Lsi Laboratories

• Kato Junichi

  Ntt System Electronics Laboratories

• SHIMAZU Nobuo

  NTT System Electronics Laboratories

• MORITA Hirofumi

  NTT LSI Laboratories

• SHIMAZU Nobuo

  NTT LSI Laboratories

• Morita H

  Lcd Division Toshiba Corporation

• Kato J

  Ntt Telecommunications Energy Lab. Kanagawa Jpn

• Kato J

  Ntt Lsi Laboratories

• Shimazu N

  Ntt Lsi Lob. Kanagawa Jpn

• MORITA Hirofumi

  NTT Telecommunications Energy Laboratories

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• Basic Characteristics of Beam Position Drift and Field Stitching Error Caused by Electron Beam Column Charging
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