Sensing Property of Self-Sensitive Piezoelectric Microcantilever Utilizing Pb(Zr0.52/Ti0.48)O3 Thin Film and LaNiO3 Oxide Electrode

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In the present study, we describe the influence of LaNiO3 (LNO) oxide electrodes on the sensing property of self-sensitive piezoelectric microcantilevers using Pb(Zr0.52/Ti0.48)O3 (PZT) thin films as a sensor and an actuator. Microcantilevers with and without LNO thin films were fabricated through microelectromchanical systems (MEMS) microfabrication process. The transverse piezoelectric constant $d_{31}$ of the PZT thin films with LNO thin films was determined to be $-120$ pm/V, while those without LNO thin films was determined to be $-80$ pm/V. In spite of the higher piezoelectric constant, the sensor output of the self-sensitive cantilevers with LNO thin films is only about 1/5 of those without LNO thin films. The result will be discussed in relation to the dielectric loss of the PZT thin films.
2007-10-30