Pulsed Laser Deposited Lead Zirconate Titanate Thin Films for Micro Actuators
スポンサーリンク
概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-06-30
著者
-
Wang Z
東北大 大学院工学研究科
-
Zhang L
Functional Materials Research Laboratory Tongji University
-
MAEDA Ryutaro
National Institute of Advanced Industrial Science and Technology
-
TSAUR Jiunnjye
National Institute of Advanced Industrial Science and Technology
-
ZHANG Lulu
National Institute of Advanced Industrial Science and Technology
-
ICHIKI Masaaki
National Institute of Advanced Industrial Science and Technology
-
WANG Zhan-Jie
Tohoku University
関連論文
- Inductively Coupled Plasma Reactive Ion Etching of Lead Zirconate Titanate Thin Films for MEMS Application
- Magnesium-Ion Indiffusion to Lithium Niobate Single-Crystal Fiber with MgF_2 as Diffusion Source
- Formation Mechanism for High-Surface-Area Anatase Titania Nanoparticles Prepared by Metalorganic Chemical Vapor Deposition
- 221 Grain Boundary Engineering of 304 Stainless Steel Assisted by Laser Surface Melting
- Preparation and Characterization of Lead Zirconate Titanate Thin Films Derived by Hybrid Processing: Sol-Gel Method and Pulsed Laser Deposition
- Preparation and Application of Lead Zirconate Titanate (PZT) Films Deposited by Hybrid Process : Sol-Gel Method and Laser Ablation
- Electrical Properties and Microstructure of Lead Zirconate Titanate Thin Film In Situ Grown by Hybrid Processing : Sol-Gel Method and Pulsed Laser Deposition
- Effect of Zr/Ti Ratio in Targets on Electrical Properties of Lead Zirconate Titanate Thin Films Derived by Pulsed Laser Deposition on Template Layer
- Microstructure and Electrical Properties of Lead Zirconate Titanate Thin Films Deposited by Excimer Laser Ablation
- Characteristics of Photovoltaic Lead Lanthanum Zirconate Titanate Ceramics in a Layered Film Structure Design
- The Magnesium Diffused Layer Characteristics of a Lithium Niobate Single Crystal with Magnesium-Ion Indiffusion
- Effect of Collection Distance on the Lattice Structure of Anatase Titania Nanoparticles Prepared by Metalorganic Chemical Vapor Deposition : Structure and Mechanical and Thermal Properties of Condensed Matter
- High Anatase-Rutile Transformation Temperature of Anatase Titania Nanoparticles Prepared by Metalorganic Chemical Vapor Deposition : Structure and Mechanical and Thermal Properties of Condensed Matter
- Electrical Properties of Ferroelectric Lead Lanthanum Zirconate Titanate as an Energy Transducer for Application to Electrostatic-Optical Motor
- X-Ray Diffraction and Scanning Electron Microscopy Observation of Lead Zirconate Titanate Thick Film Formed by Gas Deposition Method
- Optical Activity and Phase Transition of Pb_La_x(Zr_yTi_z)_O_3 ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Optical Study of Pb_La_x(Zr_yTi_z)_O_3
- PZT Film Formation With Use of Spray Coating Method
- Lead Zirconate Titanate Film Formation Technology with Spray Coating Method
- Pulsed Laser Deposited Lead Zirconate Titanate Thin Films for Micro Actuators
- Design and Fabrication of 1D and 2D Micro Scanners Actuated by Double Layered Lead Zirconate Titanate (PZT) Bimorph Beams
- Heat Flow and Detectivity of Multilayer Thin-Film Pyroelectric Detector
- Deposition and Patterning Technique for Realization of Pb(Zr_, Ti_)O_3 Thick Film Micro Actuator
- New Molding Technique Using Ultra-fine Particles for Realization of Three Dimensional Micro Structure (特集:MEMS技術)
- Residual Stress Study of SiO_2/Pt/Pb(Zr,Ti)O_3/Pt Multilayer Structure for Micro Electro Mechanical System Applications
- Piezoelectric Optical Micro Scanner with Built-in Torsion Sensor
- Sensing Property of Self-Sensitive Piezoelectric Microcantilever Utilizing Pb(Zr0.52/Ti0.48)O3 Thin Film and LaNiO3 Oxide Electrode
- Electrical Properties and Microstructures of Sol-Gel-Deposited Lead Zirconate Titanate Thin Films Crystallized by 28 GHz Microwave Irradiation
- Fabrication of Optical Micro Scanner Driven by PZT Actuators
- Electrical Properties and Microstructure of Lead Zirconate Titanate Thin Film In Situ Grown by Hybrid Processing:Sol-Gel Method and Pulsed Laser Deposition
- Pulsed Laser Deposited Lead Zirconate Titanate Thin Films for Micro Actuators
- Study on Homogeneous Wafer Level Dielectric Film Preparation Using Chemical Solution Deposition Method
- Study on Homogeneous Wafer Level Dielectric Film Preparation Using Chemical Solution Deposition Method