New Molding Technique Using Ultra-fine Particles for Realization of Three Dimensional Micro Structure (特集:MEMS技術)
スポンサーリンク
概要
著者
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Maeda R
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
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Akedo Jun
National Institute Of Advanced Industrial Science And Technology
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Akedo Jun
Mechanical Engineering Laboratory Agency Of Industrial Science And Technology Ministry Of Internatio
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ICHIKI Masaaki
National Institute of Advanced Industrial Science and Technology
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Ichiki M
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
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Akedo J
National Institute Of Advanced Industrial Science And Technology (aist)
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Kikuchi Kaoru
Mel Aist/miti
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ICHIKI Masaaki
Japan Science and Technology Corporation c/o MEL,AIST/MITI
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KIKUCHI Kaoru
MEL,AIST/MITI
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MAEDA Ryutaro
MEL,AIST/MITI
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Akedo Jun
Mechanical Engineering Laboratory A.i.s.t M.i.t.i.
関連論文
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- Preparation and Application of Lead Zirconate Titanate (PZT) Films Deposited by Hybrid Process : Sol-Gel Method and Laser Ablation
- Electro-Optical Properties of (Pb, La)(Zr, Ti)O_3 Films Prepared by Aerosol Deposition Method
- Electrical Properties and Microstructure of Lead Zirconate Titanate Thin Film In Situ Grown by Hybrid Processing : Sol-Gel Method and Pulsed Laser Deposition
- Effect of Zr/Ti Ratio in Targets on Electrical Properties of Lead Zirconate Titanate Thin Films Derived by Pulsed Laser Deposition on Template Layer
- Microstructure and Electrical Properties of Lead Zirconate Titanate Thin Films Deposited by Excimer Laser Ablation
- Aerosol Deposition Method for Preparation of Lead Zirconate Titanate Thick Layer at Low Temperature : Improvement of Electrical Properties by Irradiation of Fast Atom Beam and Plasma
- Characteristics of Photovoltaic Lead Lanthanum Zirconate Titanate Ceramics in a Layered Film Structure Design
- Aerosol Deposition on Transparent Electro-Optic Films for Optical Modulators(Micro/Nano Fabrication,Microoptomechatronics)
- Dielectric Characteristics of Ferroelectric Films Prepared by Aerosol Deposition in THz Range (Special Issue: Ferroelectric Materials and Their Applications)
- Electro-Optic Properties of Pb(Zr1-xTix)O3 (X=0,0.3,0.6) Films Prepared by Aerosol Deposition
- Electro-Optical Properties and Structures of (Pb, La)(Zr, Ti)O_3 and PbTiO_3 Films Prepared Using Aerosol Deposition Method
- Hydroxyapatite Coating on Titanium Plate with an Ultrafine Particle Beam
- Electrical Properties of Ferroelectric Lead Lanthanum Zirconate Titanate as an Energy Transducer for Application to Electrostatic-Optical Motor
- X-Ray Diffraction and Scanning Electron Microscopy Observation of Lead Zirconate Titanate Thick Film Formed by Gas Deposition Method
- Room-Temperature Bonding of Si Wafers to Pt Films on SiO_2 or LiNbO_3 Substrates Using Ar-Beam Surface Activation
- Transmission Electron Microscope Observations of Si/Si Interface Bonded at Room Temperature by Ar Beam Surface Activation
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- Tip-Scanning Dynamic Force Microscope Using Piezoelectric Cantilever for Full Wafer Inspection
- Optical Activity and Phase Transition of Pb_La_x(Zr_yTi_z)_O_3 ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
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- New Molding Technique Using Ultra-fine Particles for Realization of Three Dimensional Micro Structure (特集:MEMS技術)
- Deposition of Hydroxyapatite Film on Titanium by Ultra-fine Particle Beam(Physics, Processes, Instruments & Measurements)
- Actuation Properties of Lead Zirconate Titanate Thick Films Structured on Si Membrane by the Aerosol Deposition Method
- Microstructure and Electrical Properties of Lead Zirconate Titanate (Pb(Zr_/Ti)O_3) Thick Films Deposited by Aerosol Deposition Method
- Non-contact Air Holding Mechanism for Inspection of Pipe Inner Walls
- Periodic microstructures formation on plastic plate by aerosol beam irradiation (溶射特集号)
- Sensing Property of Self-Sensitive Piezoelectric Microcantilever Utilizing Pb(Zr0.52/Ti0.48)O3 Thin Film and LaNiO3 Oxide Electrode
- Application of Gas Jet Deposition Method to Piezoelectric Thick Film Miniature Actuator
- Electrical Properties and Microstructures of Sol-Gel-Deposited Lead Zirconate Titanate Thin Films Crystallized by 28 GHz Microwave Irradiation
- Electrical Properties and Microstructure of Lead Zirconate Titanate Thin Film In Situ Grown by Hybrid Processing:Sol-Gel Method and Pulsed Laser Deposition
- Pulsed Laser Deposited Lead Zirconate Titanate Thin Films for Micro Actuators
- Study on Homogeneous Wafer Level Dielectric Film Preparation Using Chemical Solution Deposition Method
- Study on Homogeneous Wafer Level Dielectric Film Preparation Using Chemical Solution Deposition Method