Measurements of Piezoelectric Coefficient of Pb(Zr,Ti)O_3 Thin Film Using a Piezoelectric Microcantilever
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-12-01
著者
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Wang Z
Inst. Physics Chinese Acad. Of Sci. Beijing Chn
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Maeda R
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
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Chu J
Shanghai Inst. Of Technical Physics Chinese Acad. Of Sci. Shanghai Chn
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Chu Jiaru
Mechanical Engineering Laboratory Agency Of Industrial Science And Technology Ministry Of Internatio
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Chu J
Univ. Sci. And Technol. Of China Anhui Chn
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Wang Z
Atmi Inc. Connecticut Usa
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CHU Jiaru
Surface and Interface Division, Mechanical Engineering Laboratory, AIST
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WANG Zhanjie
MITI
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MAEDA Ryutaro
Surface and Interface Division, Mechanical Engineering Laboratory, AIST
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- Microstructure and Electrical Properties of Lead Zirconate Titanate Thin Films Deposited by Excimer Laser Ablation
- X-Ray Diffraction and Scanning Electron Microscopy Observation of Lead Zirconate Titanate Thick Film Formed by Gas Deposition Method
- Room-Temperature Bonding of Si Wafers to Pt Films on SiO_2 or LiNbO_3 Substrates Using Ar-Beam Surface Activation
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- Effect of Surface Roughness on Room-Temperature Wafer Bonding by Ar Beam Surface Activation
- Microfabricated Dynamic Scanning Force Microscope Using a Three Dimensional Piezoelectric T-shape Actuator
- Tip-Scanning Dynamic Force Microscope Using Piezoelectric Cantilever for Full Wafer Inspection
- Development of Ultra Scanning Force Microscope
- PZT Film Formation With Use of Spray Coating Method
- Design and Fabrication of 1D and 2D Micro Scanners Actuated by Double Layered Lead Zirconate Titanate (PZT) Bimorph Beams
- Measurements of Piezoelectric Coefficient of Pb(Zr,Ti)O_3 Thin Film Using a Piezoelectric Microcantilever
- Deposition and Patterning Technique for Realization of Pb(Zr_, Ti_)O_3 Thick Film Micro Actuator
- New Molding Technique Using Ultra-fine Particles for Realization of Three Dimensional Micro Structure (特集:MEMS技術)