Development of Ultra Scanning Force Microscope
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概要
- 論文の詳細を見る
- 1998-03-05
著者
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Suga T
Research Center For Advanced Science And Technology University Of Tokyo
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Chu J
Shanghai Inst. Of Technical Physics Chinese Acad. Of Sci. Shanghai Chn
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Chu Jiaru
Mechanical Engineering Laboratory Agency Of Industrial Science And Technology Ministry Of Internatio
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Chu J
Univ. Sci. And Technol. Of China Anhui Chn
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CHU Jiaru
RCAST, Tokyo Univ.
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ITOH Toshihiro
RCAST, Tokyo Univ.
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SUGA Tadatomo
RCAST, Tokyo Univ.
関連論文
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- Phase Diagram of YBa_2Cu_3O_, Y_2Ba_4Cu_7O_ and YBa_2Cu_4O_8 Superconductors
- Room-Temperature Bonding of Si Wafers to Pt Films on SiO_2 or LiNbO_3 Substrates Using Ar-Beam Surface Activation
- Transmission Electron Microscope Observations of Si/Si Interface Bonded at Room Temperature by Ar Beam Surface Activation
- Effect of Surface Roughness on Room-Temperature Wafer Bonding by Ar Beam Surface Activation
- InGaAsP Lasers on GaAs Fabricated by the Surface Activated Wafer Direct Bonding Method at Room Temperature
- InGaAsP Laser on GaAs Fabricated by the Surface Activated Wafer Direct Bonding Method at Room Temperature
- Water Direct Bonding at Room Temperature by Means of the Surface Activated Bonding
- Microfabricated Dynamic Scanning Force Microscope Using a Three Dimensional Piezoelectric T-shape Actuator
- Tip-Scanning Dynamic Force Microscope Using Piezoelectric Cantilever for Full Wafer Inspection
- Development of Ultra Scanning Force Microscope
- Measurements of Piezoelectric Coefficient of Pb(Zr,Ti)O_3 Thin Film Using a Piezoelectric Microcantilever
- Deposition and Patterning Technique for Realization of Pb(Zr_, Ti_)O_3 Thick Film Micro Actuator