104 圧電薄膜を利用したアクティブスライダの試作(情報機器コンピュータメカニクス1 : ヘッド・ディスク・インタフェース)

概要

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This paper describes a novel approach for reducing the head/disk spacing in magnetic recording disk storage. The authors propose active sliders with thin film PZT that control the head/disk spacing less than 10 nm. This slider is designed so that the margin for working tolerance and spacing drop at a high altitude is compensated by raising or lowering the head actively. A pico-slider with three stepped pads and a unimorph cantilever structure is fabricated monolithically by using silicon micromachining techniques. Experimental testing shows that the displacement of the cantilever tip is 40-60 nm by applying voltage of 4 V and the piezoelectric constant d_<31> is determined as 80 × 10^<-12> m/V.
一般社団法人日本機械学会の論文
2001-03-23