PZT Film Formation With Use of Spray Coating Method
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概要
- 論文の詳細を見る
This paper reports a new proposal on PZT film formation technology both on planar and non-planar surface with use of spray coating method. SEM observation shows the film formation on non-planar and edged surface of Si-wafer. Ferroelectric properties is confirmed with ferroelectric test system. Several kinds of applications of this method is also shown for the future target.
- 社団法人 電気学会の論文
- 2003-12-01
著者
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Yang Zhen
Institute Of Mechanical System Engineering National Institute Of Advanced Industrial Science And Tec
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Zhang L
Functional Materials Research Laboratory Tongji University
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Zhang Liangying
Electronic Materials Research Laoratory Xi'an Jiaotong University
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Maeda R
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
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ICHIKI Masaaki
National Institute of Advanced Industrial Science and Technology
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Zhang Liangying
Functional Materials Research Laboratory Tongji University
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Zhang L
National Institute Of Advanced Industrial Science And Technology
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Ichiki M
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
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Ichiki Masaaki
Institute Of Mechanical System Engineering National Institute Of Advanced Industrial Science And Tec
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ZHANG Lulu
Institute of Mechanical System Engineering, National Institute of Advanced Industrial Science and Te
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IKEHARA Tsuyoshi
Institute of Mechanical System Engineering, National Institute of Advanced Industrial Science and Te
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MAEDA Ryutaro
Institute of Mechanical System Engineering, National Institute of Advanced Industrial Science and Te
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Ikehara Tsuyoshi
Institute Of Mechanical System Engineering National Institute Of Advanced Industrial Science And Tec
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Maeda Ryutaro
Institute Of Mechanical System Engineering National Institute Of Advanced Industrial Science And Tec
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Zhang L
Institute Of Mechanical System Engineering National Institute Of Advanced Industrial Science And Tec
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