Residual Stress Study of SiO_2/Pt/Pb(Zr,Ti)O_3/Pt Multilayer Structure for Micro Electro Mechanical System Applications
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-03-15
著者
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MAEDA Ryutaro
National Institute of Advanced Industrial Science and Technology
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TSAUR Jiunnjye
National Institute of Advanced Industrial Science and Technology
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ZHANG Lulu
National Institute of Advanced Industrial Science and Technology
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Maeda Ryutaro
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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