Micro Hot Embossing for Replication of Microstructures

概要

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This paper reports the development of a micro-hot embossing process for high-quality microstructure transfer from molds to polymer materials. Polycarbonate was selected as the structural material. Replications of rectangular reflecting mirrors with dimensions of 500 μm (L) $\times$ 100 μm (W) $\times$ 220 μm (H) were performed. To replicate such microstructures with vertical sidewall surfaces, a combination of temperature of 185°C and pressure of 1.7 kg/mm2 was necessary. The finished vertical surfaces were sufficiently smooth to be used in an optical switch as reflection mirrors. Replications of micro V-grooves and microlens cavities for passive alignment of optical fibers and microlenses were carried out as well. It can be concluded that a combination of embossing temperature above 175°C and applied pressure above 5 kg/mm2 is necessary to achieve a perfect replication of such microstructures with tapered surfaces. The executive results of this research demonstrated that micro hot embossing is a promising technology for fabricating high precision microstructures with polymer materials and allows the low-cost production of microcomponents.
2003-06-15