Pressure Dependence of Resonant Characteristics of Lateral Comb Drive Resonators in the Free-Molecule Regime
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概要
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We describe a method for estimating the quality factors of lateral comb drive resonators, especially with trench structures in free-molecule regime, and compare their calculated and experimental values. Although, in past, many studies on air damping of resonators have been carried out, but air damping model for comb drive resonators in the free-molecule regime has not been addressed. We propose mechanism of the energy loss which occurs in the gap between movable plates (known as trench structure), and between a movable plate and a fixed wall. It was shown that the trench structures have almost no effect on the decrease of the quality factor.
- Japan Society of Applied Physicsの論文
- 2009-09-25
著者
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Suga Tadatomo
Univ. Tokyo Tokyo Jpn
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Suga Tadatomo
The Univ. Of Tokyo Dept. Of Precision Eng. School Of Eng.
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Itoh Toshihiro
The University Of Tokyo
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Okada Hironao
The University Of Tokyo
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