Room Temperature Vacuum Sealing with Au Thin Films Using Ar Beam Surface Activation

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概要

• 論文の詳細を見る
• 2006-09-13

著者

• Suga Tadatomo

  Univ. Tokyo Tokyo Jpn

• Itoh Toshihiro

  The University Of Tokyo

• Okada Hironao

  The University Of Tokyo

• OKADA Hironao

  Univ. of Tokyo, Dept. of Precision Eng, School of Eng.

• ITOH Toshihiro

  Univ. of Tokyo, Dept. of Precision Eng, School of Eng.

• Suga Tadatomo

  Univ. Of Tokyo Dept. Of Precision Eng. School Of Eng.

関連論文

• SAW Bumpless Bonding at Low Temperature in Ambient Air
• Pressure Dependence of Resonant Characteristics of Lateral Comb Drive Resonators in the Free-Molecule Regime
• Room Temperature Vacuum Sealing with Au Thin Films Using Ar Beam Surface Activation

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