Nanoimprint of Glass Materials with Glassy Carbon Molds Fabricated by Focused-Ion-Beam Etching
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概要
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Micro/nano-imprinting or hot embossing is a target of interest for the industrial production of microdevices. In fluidic micro electromechanical systems (MEMS) applications, polymer materials have been employed for their low cost in the fabrication of economical products. However, glasses are much more suitable for higher-temperature applications or use in reactive chemical environments. In optical MEMS as well, glasses are good candidate materials for enhanced optical properties. In this study, micro/nano-imprinting was employed for Pyrex glass and quartz glass molding, and test structures were successfully fabricated with good fidelity for a $10\times 10\times 7$ μm microstructure and a 0.3 μm line-and-space pattern with a depth of 0.4 μm.
- 2005-07-15
著者
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Takahashi Masaharu
Advanced Manufacturing Research Institute National Institute Of Advanced Industrial Science And Tech
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Sugimoto Kohichi
Department Of Clinical Pharmacology Jichi Medical College
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Maeda Ryutaro
Advanced Manufacturing Research Institute (AMRI), National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan
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Maeda Ryutaro
Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology, 1-2-1 Namiki, Tsukuba 305-8564, Japan
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Takahashi Masaharu
Advanced Manufacturing Research Institute (AMRI), National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan
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Takahashi Masaharu
Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology, 1-2-1 Namiki, Tsukuba 305-8564, Japan
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Sugimoto Kohichi
Department of Mechanical Systems Engineering, Faculty of Engineering, University of Shinshu, 4-17-1 Wakasato, Nagano 380-8553, Japan
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