Nanoimprint Lithography Combined with Ultrasonic Vibration on Polycarbonate
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概要
- 論文の詳細を見る
We have succeeded in transferring nanopatterns to the surface of a polycarbonate sheet by combining thermal nanoimprint lithography with ultrasonic vibration at a low temperature. The mold pattern was a cross-mark for alignment consisting of lines and spaces or a dot pattern with widths of 500 and 750 nm. The mold was fabricated by dry etching a Si substrate using micro-electro-mechanical-system (MEMS) fabrication technology. The experiment was executed using an original system that was used to build a 19 kHz ultrasonic vibration unit with a maximum magnitude of 1.8 μm for a thermal nanoimprint lithography device. Typically, the optimal heating temperature in thermal nanoimprint lithography using polycarbonate is 180 °C, but when ultrasonic vibration is applied, it becomes possible to mold nanopatterns at a lower temperature (160 °C). As a result, the process time of a thermal cycle could be cut in half, thus improving the throughput greatly.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-09-30
著者
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Goto Hiroshi
Advanced Manufacturing Research Institute (AMRI), National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan
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Mekaru Harutaka
Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan
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Takahashi Masaharu
Advanced Manufacturing Research Institute (AMRI), National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan
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Noguchi Toshihiko
Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan
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Goto Hiroshi
Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan
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