High-efficient Chip to Wafer Self-alignment and Bonding for Flexible and Size-free MEMS-IC Integration
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概要
- 論文の詳細を見る
- 2012-08-01
著者
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Lu Jian
National Institute Of Advanced Industrial Science And Technology (aist)
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Takagi Hideki
National Inst. Of Advanced Industrial Sci. And Technol.
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Takagi Hideki
Research Center For Ubiquitous Mems And Micro Engineering (umemsme) National Institute Of Advanced Industrial Science And Technology (aist)
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Lu Jian
Research Center For Ubiquitous Mems And Micro Engineering (umemsme) National Institute Of Advanced Industrial Science And Technology (aist)
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NAKANO Yuta
Tokyo University of Science
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MAEDA Ryutaro
Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST)
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Lu Jiam
Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST)
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