Property Variation of Ni--W Electroformed Mold for Micro-Press Molding
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概要
- 論文の詳細を見る
We proposed a simple method to fabricate a Ni--W electroformed mold for glass micro-press molding. For example, borosilicate glass (D263) was molded using the Ni--W electroformed mold. A Ni--W electroformed mold with a fine line was fabricated by photolithography and electroforming technology. Additionally, the Ni--W electroformed mold did not require a release layer. As the result of molding D263 at 883 K, the minimum pitch of the glass pattern was the same as that of the Ni--W electroformed mold. We argue that the crystallization of amorphous Ni--W occurred with the activation energy derived from the heating of micro-press molding. The heating temperature was 833 K. Additionally, the release characteristics of a Ni--W film were improved by increasing the percentage of W. In terms of the thermochemical stability and high content rate of W, we indicated that Ni--W electroformed molds can be used repeatedly for glass micro-press molding.
- 2013-11-25
著者
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TAKAHASHI Masaharu
Research Center for Frontier Medical Engineering, Chiba University
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Kaneko Satoru
Kanagawa Industrial Technol. Center Kanagawa Jpn
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MAEDA Ryutaro
Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST)
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Yasui Manabu
Kanagawa Industrial Technology Center, 705-1 Shimoimaizumi, Ebina, Kanagawa 243-0435, Japan
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Hirabayashi Yasuo
Kanagawa Industrial Technology Center, 705-1 Shimoimaizumi, Ebina, Kanagawa 243-0435, Japan
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Ozawa Takeshi
Kanagawa Industrial Technology Center, Ebina, Kanagawa 243-0435, Japan
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Arai Masahiro
Faculty of Engineering, Shinshu University, Nagano 380-8553, Japan
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Hirabayashi Yasuo
Kanagawa Industrial Technology Center, Ebina, Kanagawa 243-0435, Japan
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Ito Hiroaki
Faculty of Engineering, Shinshu University, Nagano 380-8553, Japan
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Kaneko Satoru
Kanagawa Industrial Technology Center, Ebina, Kanagawa 243-0435, Japan
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Takahashi Masaharu
Research Center for Ubiquitous MEMS and Micro Engineering, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8564, Japan
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