Mass Density as Basis Parameter on Mechanical Properties under Diamond-Like Carbon Prepared in Wide Range of Conditions Using Variety of Methods
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概要
- 論文の詳細を見る
Diamond-like carbon (DLC) films were prepared on steel substrates by eleven suppliers using different types of equipment utilized in each company's own coating formation process. The deposition methods include sputtering, electron cyclotron resonance chemical vapor deposition (ECR-CVD), plasma enhanced chemical vapor deposition (PECVD), arc ion plating (Arc), filtered arc deposition (FAD), and plasma-based ion implantation (PBII). Some correlation of mechanical properties seems to be valid in a narrow range of parameters produced by a particular deposition method. In order to investigate general correlations in a wide range of parameters, various DLC films were prepared by different suppliers on the same substrate, and were evaluated in exactly the same manner. Independent of deposition methods, there existed correlations of the hardness, elastic modulus and Raman shift with a wide range of mass density.
- 2011-01-25
著者
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KUMAGAI Masao
Kanagawa Industrial Technology Research Institute
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Tanaka Satomi
Kanagawa Industrial Technology Research Institute
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Takikawa Hirofumi
Department Of Electrical And Electronic Engineering Toyohashi University Of Technology
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Kamiya Masao
Department Of Animal Disease Control Graduate School Of Veterinary Medicine Hokkaido University
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Kaneko Satoru
Kanagawa Industrial Technol. Center Kanagawa Jpn
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Kato Chihiro
Kanagawa Industrial Technology Center, Ebina, Kanagawa 243-0435, Japan
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Kaneko Satoru
Kanagawa Industrial Technology Center, Kanagawa Prefectural Government, 705-1 Shimo-Imaizumi, Ebina, Kanagawa 243-0435, Japan
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Horiuchi Takahiro
Kanagawa Industrial Technology Center, Kanagawa Prefectural Government, 705-1 Shimo-Imaizumi, Ebina, Kanagawa 243-0435, Japan
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Yoshida Kentaro
Kanagawa Industrial Technology Center, Kanagawa Prefectural Government, 705-1 Shimo-Imaizumi, Ebina, Kanagawa 243-0435, Japan
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Kano Makoto
Kanagawa Industrial Technology Center, Kanagawa Prefectural Government, 705-1 Shimo-Imaizumi, Ebina, Kanagawa 243-0435, Japan
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Tanoue Hideto
Department of Electrical and Electronic Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku, Toyohashi, Aichi 441-8580, Japan
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Tanoue Hideto
Department of Electric and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8105, Japan
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Tanaka Satomi
Kanagawa Industrial Technology Center, Kanagawa Prefectural Government, 705-1 Shimo-Imaizumi, Ebina, Kanagawa 243-0435, Japan
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Kumagai Masao
Kanagawa Industrial Technology Center, Kanagawa Prefectural Government, 705-1 Shimo-Imaizumi, Ebina, Kanagawa 243-0435, Japan
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Kumagai Masao
Kanagawa High-Technology Foundation, Kanagawa Science Park, Kawasaki, Kanagawa 213, Japan
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Kamiya Masao
Department of Electrical and Electronic Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku, Toyohashi, Aichi 441-8580, Japan
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Horiuchi Takahiro
Kanagawa Industrial Technology Center, Ebina, Kanagawa 243-0435, Japan
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Takikawa Hirofumi
Department of Electric and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8105, Japan
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