Preparation of Sol–Gel Derived Titanium Oxide Thin Films Using Vacuum Ultraviolet Irradiation with a Xenon Excimer Lamp
スポンサーリンク
概要
- 論文の詳細を見る
Titanium oxide thin films are prepared by the sol–gel technique with 172 nm vacuum ultraviolet (VUV) irradiation using a Xe$_{2}^{*}$ excimer lamp. The effect of VUV irradiation on spin-coated films was investigated by UV-visible absorption, X-ray photoelectron, Fourier transform infrared and Raman spectroscopies. The results showed that VUV irradiation causes the removal of hydroxyl and organic functional groups from the transparent coating film without causing the reduction of titanium, so that the film begins to transform into an oxide from a hydroxide. It was found that VUV irradiation onto a dried coating film is effective in accelerating the formation of Ti–O networks and crystallization.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-09-15
著者
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Tanaka Satomi
Kanagawa Industrial Technology Research Institute
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Kato Chihiro
Kanagawa Industrial Technology Research Institute, 705-1 Shimo-imaizumi, Ebina, Kanagawa 243-0435, Japan
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Kato Chihiro
Kanagawa Industrial Technology Center, Ebina, Kanagawa 243-0435, Japan
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Naganuma Yasuhiro
Kanagawa Industrial Technology Research Institute, 705-1 Shimo-imaizumi, Ebina, Kanagawa 243-0435, Japan
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Tanaka Satomi
Kanagawa Industrial Technology Research Institute, 705-1 Shimo-imaizumi, Ebina, Kanagawa 243-0435, Japan
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Tanaka Satomi
Kanagawa Industrial Technology Center, Kanagawa Prefectural Government, 705-1 Shimo-Imaizumi, Ebina, Kanagawa 243-0435, Japan
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- Preparation of Sol–Gel Derived Titanium Oxide Thin Films Using Vacuum Ultraviolet Irradiation with a Xenon Excimer Lamp