Evolution of Atomically Stepped Surface of Indium Tin Oxide Thin Films Grown on Nanoimprinted Glass Substrates

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概要

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• Indium tin oxide (ITO) thin films were deposited on atomically stepped glass substrates (step height of ${\sim}0.2$ nm and separation of ${\sim}80$ nm) by pulsed laser deposition. The atomically stepped glass was prepared via thermal nanoimprint using an atomically stepped sapphire mold. The surface morphology of the ITO thin film definitely reflected the atomically stepped pattern of the glass substrate surface. The step height and the separation of the ITO film surface were close to those of the nanoimprinted glass surface. The fast Fourier transform analysis of the atomic force microscopy image also confirmed the periodicity of the atomic-step pattern.

• 2011-03-25

著者

• MITSUHASHI Masahiko

  Kanagawa Industrial Technology Research Institute

• Miyake Yumiko

  Department Cardiology Koshigaya Hospital Dokkyo University School Of Medicine

• Akita Yasuyuki

  Department Of Physics Sophia University

• Kaneko Satoru

  Kanagawa Industrial Technol. Center Kanagawa Jpn

• Yoshimoto Mamoru

  Department Of Innovative And Engineered Materials Interdisciplinary Graduate School Of Science And E

• Nakai Hirokazu

  Department Of Innovative And Engineered Materials Tokyo Institute Of Technology

• Kaneko Satoru

  Kanagawa Industrial Technology Research Institute, Ebina, Kanagawa 243-0435, Japan

• Oi Hideo

  Kyodo International Inc., Kawasaki, 215-0005, Japan

• Mita Masahiro

  Kyodo International Inc., Kawasaki, 215-0005, Japan

• Nakai Hirokazu

  Department of Innovative & Engineered Materials, Tokyo Institute of Technology, Yokohama 226-8503, Japan

• Yoshimoto Mamoru

  Department of Innovative & Engineered Materials, Tokyo Institute of Technology, Yokohama 226-8503, Japan

• Mitsuhashi Masahiko

  Kanagawa Industrial Technology Center, Kanagawa Prefectural Government, 705-1 Shimo-Imaizumi, Ebina, Kanagawa 243-0435, Japan

• Akita Yasuyuki

  Department of Innovative & Engineered Materials, Tokyo Institute of Technology, Yokohama 226-8503, Japan

• Miyake Yumiko

  Department of Innovative & Engineered Materials, Tokyo Institute of Technology, Yokohama 226-8503, Japan

• Mita Masahiro

  Kyodo International Inc., Kawasaki 215-0005, Japan

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