Fabrication of Ni/Al<sub>2</sub>O<sub>3</sub>/Ni Heteroepitaxial Junction by Post-Hydrogen Reduction of NiO/Al<sub>2</sub>O<sub>3</sub>/NiO Trilayered Epitaxial Thin Film
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概要
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The fabrication of a Ni/Al<sub>2</sub>O<sub>3</sub>/Ni heteroepitaxial junction was achieved by the post-hydrogen reduction of a NiO/Al<sub>2</sub>O<sub>3</sub>/NiO trilayered epitaxial thin film grown by pulsed laser deposition. The top and bottom NiO layers were selectively reduced to Ni metal layers showing epitaxial relationships, while the Al<sub>2</sub>O<sub>3</sub> interlayer remained. The crystallographic and interfacial characteristics were confirmed by X-ray diffraction analysis, reflection high-energy electron diffraction, and transmission electron microscopy. The fabricated Ni/Al<sub>2</sub>O<sub>3</sub>/Ni heteroepitaxial junction exhibited atomically sharp interfaces with no amorphous boundary layer.
- 2011-09-25
著者
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Kato Yushi
Department Of Electronics And Informatics Faculty Of Engineering Toyama Prefectural University
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Kaneko Satoru
Kanagawa Industrial Technol. Center Kanagawa Jpn
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Yamauchi Ryosuke
Department Of Innovative And Engineered Materials Tokyo Institute Of Technology
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SUZUKI Toshimasa
Taiyo Yuden Co Ltd, R&D Center
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Matsuda Akifumi
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259-R3-6 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan
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Yoshimoto Mamoru
Department of Innovative & Engineered Materials, Tokyo Institute of Technology, Yokohama 226-8503, Japan
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Mitsuhashi Masahiko
Kanagawa Industrial Technology Center, Kanagawa Prefectural Government, 705-1 Shimo-Imaizumi, Ebina, Kanagawa 243-0435, Japan
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Kobayashi Keisuke
Taiyo Yuden Co., Ltd., Takasaki, Gunma 370-3347, Japan
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Arai Hideki
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, Yokohama 226-8503, Japan
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Hosaka Makoto
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, Yokohama 226-8503, Japan
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Koyama Kohji
Namiki Precision Jewel Co., Ltd., Adachi, Tokyo 123-8511, Japan
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