Microstructure and Electrical Properties of Nonstoichiometric Strontium Titanate Thin Films Grown on Platinum Electrodes
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概要
- 論文の詳細を見る
Nonstoichiometric strontium titanate films with the Sr/Ti ratio ranging from 0.9 to 1.4 were grown on Pt electrodes fabricated on Si substrates (Pt/Ta/SiO2/Si) by the RF-sputtering method with low and high deposition temperatures (250°C and 600°C, respectively). The insulating and dielectric properties of nonstoichiometric SrTiO3 films have been studied as a function of Sr/Ti ratio. The highest dielectric constant was obtained by a SrTiO3 film with a slight excess of SrO independent of the deposition temperature; the film showed better insulating property in comparison with the stoichiometric specimen, while the insulating property of TiO2-excess SrTiO3 films, consisting of SrTiO3 crystalline phase and Ti excess amorphous phase, notably depended on the deposition temperature. The high-temperature deposition resulted in better insulative resistance.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-03-15
著者
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Fujimoto Masayuki
Taiyo Yuden Co. Lid.
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Morito Kentaro
Taiyo Yuden Co. Ltd.
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SUZUKI Toshimasa
Taiyo Yuden Co Ltd, R&D Center
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Fujimoto Masayuki
Taiyo Yuden Co., Ltd., 5607-2 Nakamuroda, Haruna-machi, Gunma-gun, Gunma 370-3347, Japan
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