Microstructure and X-Ray Study of Preferentially Oriented SnO2 Thin Film Prepared by Pyrohydrolytic Decomposition
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概要
- 論文の詳細を見る
Preferentially oriented SnO2 thin films were prepared by pyrohydrolytic decomposition onto a glass substrate along the direction of flux flow. The obtained films were oriented in [200] and then [002] directions along the direction of flow. To reveal the orientation mechanism from the initial stage of growth, [200]-oriented SnO2 thin film was prepared on a chemically stable GaAs single crystal. The successive growth structure of the thin film on the substrate was accurately observed and characterized using HR-AEM (high-resolution analytical electron microscopy). A layer of nuclei about 50 Å in width was observed between the GaAs substrate and the oriented overgrown layer. It is suggested that such preferential nucleation occurs from an early stage of growth, and is strongly dependent on supersaturation of the flux flowing along the substrate.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1989-12-20
著者
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Fujimoto Masayuki
Taiyo Yuden Co. Lid.
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Urano Tetsuya
Taiyo Yuden Co., Ltd., 562 Hongo-Tsukanaka, Haruna-machi, Gunma-gun, Gunma 370-33
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Fujimoto Masayuki
Taiyo Yuden Co., Ltd., 562 Hongo-Tsukanaka, Haruna-machi, Gunma-gun, Gunma 370-33
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Murai Syunji
Taiyo Yuden Co., Ltd., 562 Hongo-Tsukanaka, Haruna-machi, Gunma-gun, Gunma 370-33
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Nishi Yuuji
Taiyo Yuden Co., Ltd., 562 Hongo-Tsukanaka, Haruna-machi, Gunma-gun, Gunma 370-33
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